The electrostatic actuator has a top electrode, a bottom electrode, and an insulating film disposed between the top electrode and the bottom electrode.
Note the top electrode is guarded, so that only current flowing across the insulator is measured by the picoammeter.
Trimmable chip capacitors are build up as multilayer plate capacitors. Vaporizing the top layer with a laser decreases the capacitance by reducing the area of the top electrode.
The top electrode 15 itself can be used to constitute a bit line, or a separate bit line can be provided.
